Spectral confocal displacement sensor

H27A9 series | H27A17 series | H27A20 series


H27A9 series


▶ Product Introduction
A technological breakthrough: The independently developed first spectral confocal displacement sensor with independent input and output light, and a separate optical fiber channel, reducing optical path interference by more than 50% compared to traditional optical fibers, solving a problem that has plagued the industry for decades. The highest testing accuracy reaches the sub-micron level, capable of measuring transparent films as thin as 8μm. Ultra-high measurement accuracy is industry-leading, with product resolution reaching the 1nm level. An independently developed spectral confocal lens with a static repeatability of 10nm, a spot size as small as 3μm, and a clearer optical path, allows for precise separation of surface and back-reflected light from ultrathin film samples. High stability: The independently developed optical structure possesses a stable and precise optical system, ensuring stable measurements even in harsh environments. High-efficiency and accurate peak acquisition and filtering algorithms are employed. Peak wavelengths can be accurately and quickly acquired, ensuring the linearity of the spectral confocal sensor's measurement accuracy.
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▶ Product Features
  • Low-cost type
  • Performance higher than laser measurement
  • Suitable for general precision measurement scenarios
▶ Naming Rules
H27 R6 A9 S60
Product diameter (mm) Measurement range (mm) Maximum measurement angle Spot size (μm)
▶ Product Specifications
model H27R6A9S60 H27R3A9S60 H27R1A9S60
External dimensions 27mm*93.3mm 27mm*93.3mm 27mm*93.3mm
Reference distance 62mm 63.5mm 63.5mm
Measurement range ±3.0mm ±1.5mm ±0.73mm
Maximum measurable angle ±9° mirror reflection surface ±9° mirror reflection surface ±9° mirror reflection surface
Minimum measurable thickness 200μm 100μm 50μm
linear accuracy ±1.5μm ±0.75μm ±0.38mm
Resolution 40nm 20nm 15nm
Spot size 60μm 60μm 60μm
Ambient lighting 20000lux 20000lux 20000lux
Enclosure protection rating IP67 IP67 IP67
Temperature drift characteristics 0.005% of F.S. /℃ 0.005% of F.S. /℃ 0.005% of F.S. /℃
Operating temperature -20~85℃ -20~85℃ -20~85℃
Storage temperature 4~51℃ 4~51℃ 4~51℃
weight 104g 104g 104g
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H27A17 series


▶ Product Introduction
A technological breakthrough: The independently developed first spectral confocal displacement sensor with independent input and output light, and a separate optical fiber channel, reducing optical path interference by more than 50% compared to traditional optical fibers, solving a problem that has plagued the industry for decades. The highest testing accuracy reaches the sub-micron level, capable of measuring transparent films as thin as 8μm. Ultra-high measurement accuracy is industry-leading, with product resolution reaching the 1nm level. An independently developed spectral confocal lens with a static repeatability of 10nm, a spot size as small as 3μm, and a clearer optical path, allows for precise separation of surface and back-reflected light from ultrathin film samples. High stability: The independently developed optical structure possesses a stable and precise optical system, ensuring stable measurements even in harsh environments. High-efficiency and accurate peak acquisition and filtering algorithms are employed. Peak wavelengths can be accurately and quickly acquired, ensuring the linearity of the spectral confocal sensor's measurement accuracy.
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▶ Product Features
  • Long distance
  • The measurement distance is appropriate.
  • Applicable to most installation scenarios
▶ Product Specifications
model H27R4A17S60 H27R2A17S60 H27R1A17S60
External dimensions 27mm*76.7mm 27mm*76.7mm 27mm*76.7mm
Reference distance 35.4mm 36.4mm 36.4mm
Measurement range ±2.1mm ±1.05mm ±0.5mm
Maximum measurable angle ±17° mirror reflection surface ±17° mirror reflection surface ±17° mirror reflection surface
Minimum measurable thickness 140μm 70μm 36μm
linear accuracy ±2.1μm ±1.1μm ±0.5mm
Resolution 12nm 6 nm 3nm
Spot size 60μm 60μm 60μm
Ambient lighting 20000lux 20000lux 20000lux
Enclosure protection rating IP67 IP67 IP67
Temperature drift characteristics 0.005% of F.S. /℃ 0.005% of F.S. /℃ 0.005% of F.S. /℃
Operating temperature -20~85℃ -20~85℃ -20~85℃
Storage temperature 4~51℃ 4~51℃ 4~51℃
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H27A20 series


▶ Product Introduction
A technological breakthrough: The independently developed first spectral confocal displacement sensor with independent input and output light, and a separate optical fiber channel, reducing optical path interference by more than 50% compared to traditional optical fibers, solving a problem that has plagued the industry for decades. The highest testing accuracy reaches the sub-micron level, capable of measuring transparent films as thin as 8μm. Ultra-high measurement accuracy is industry-leading, with product resolution reaching the 1nm level. An independently developed spectral confocal lens with a static repeatability of 10nm, a spot size as small as 3μm, and a clearer optical path, allows for precise separation of surface and back-reflected light from ultrathin film samples. High stability: The independently developed optical structure possesses a stable and precise optical system, ensuring stable measurements even in harsh environments. High-efficiency and accurate peak acquisition and filtering algorithms are employed. Peak wavelengths can be accurately and quickly acquired, ensuring the linearity of the spectral confocal sensor's measurement accuracy.
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▶ Product Features
  • Comprehensive
  • Balance of all performance parameters
  • Suitable for most installation scenarios
▶ Product Specifications
model H27R2A20S13 H27R1A20S13 H27R06A20S13
External dimensions 27mm*161.1mm 27mm*161.1mm 27mm*161.1mm
Reference distance 24.2mm 24.8mm 24.8mm
Measurement range ±1.2mm ±0.6mm ±0.3mm
Maximum measurable angle ±20° mirror reflection surface ±20° mirror reflection surface ±20° mirror reflection surface
Minimum measurable thickness 83μm 42μm 20μm
linear accuracy ±0.62μm ±0.3μm ±0.15mm
Resolution 6 nm 3nm 2 nm
Spot size 13μm 13μm 13μm
Ambient lighting 20000lux 20000lux 20000lux
Enclosure protection rating IP67 IP67 IP67
Temperature drift characteristics 0.005% of F.S. /℃ 0.005% of F.S. /℃ 0.005% of F.S. /℃
Operating temperature -20~85℃ -20~85℃ -20~85℃
Storage temperature 4~51℃ 4~51℃ 4~51℃
weight 132g 132g 132g