Spectral confocal displacement sensor

H65A18 series H65A52 series


H65A18 series


▶ Product Introduction
A technological breakthrough: The independently developed first spectral confocal displacement sensor with independent input and output light, and a separate optical fiber channel, reducing optical path interference by more than 50% compared to traditional optical fibers, solving a problem that has plagued the industry for decades. The highest testing accuracy reaches the sub-micron level, capable of measuring transparent films as thin as 8μm. Ultra-high measurement accuracy is industry-leading, with product resolution reaching the 1nm level. An independently developed spectral confocal lens with a static repeatability of 10nm, a spot size as small as 3μm, and a clearer optical path, allows for precise separation of surface and back-reflected light from ultrathin film samples. High stability: The independently developed optical structure possesses a stable and precise optical system, ensuring stable measurements even in harsh environments. High-efficiency and accurate peak acquisition and filtering algorithms are employed. Peak wavelengths can be accurately and quickly acquired, ensuring the linearity of the spectral confocal sensor's measurement accuracy.
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▶ Product Features
  • Long distance
  • Larger size, wider measuring range
  • Suitable for scenarios requiring long working distances
▶ Naming Rules
H65 R23 A18 S14
Product diameter (mm) Measurement range (mm) Maximum measurement angle Spot size (μm)
▶ Product Specifications
model H65R23A18S14 H65R11A18S14 H65R5A18S14
External dimensions 65mm*239.4mm 65mm*239.4mm 65mm*239.4mm
Reference distance 70.8mm 76.7mm 76.7mm
Measurement range ±11.7mm ±5.8mm ±2.9mm
Maximum measurable angle ±18° mirror reflection surface ±18° mirror reflection surface ±18° mirror reflection surface
Minimum measurable thickness 780μm 390μm 193μm
linear accuracy ±5.8μm ±2.9μm ±1.5mm
Resolution 50nm 25nm 13nm
Spot size 14μm 14μm 14μm
Ambient lighting 20000lux 20000lux 20000lux
Enclosure protection rating IP67 IP67 IP67
Temperature drift characteristics 0.005% of F.S. /℃ 0.005% of F.S. /℃ 0.005% of F.S. /℃
Operating temperature -20~85℃ -20~85℃ -20~85℃
Storage temperature 4~51℃ 4~51℃ 4~51℃
weight 620g 620g 620g
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H65A52 series


▶ Product Introduction
A technological breakthrough: The independently developed first spectral confocal displacement sensor with independent input and output light, and a separate optical fiber channel, reducing optical path interference by more than 50% compared to traditional optical fibers, solving a problem that has plagued the industry for decades. The highest testing accuracy reaches the sub-micron level, capable of measuring transparent films as thin as 8μm. Ultra-high measurement accuracy is industry-leading, with product resolution reaching the 1nm level. An independently developed spectral confocal lens with a static repeatability of 10nm, a spot size as small as 3μm, and a clearer optical path, allows for precise separation of surface and back-reflected light from ultrathin film samples. High stability: The independently developed optical structure possesses a stable and precise optical system, ensuring stable measurements even in harsh environments. High-efficiency and accurate peak acquisition and filtering algorithms are employed. Peak wavelengths can be accurately and quickly acquired, ensuring the linearity of the spectral confocal sensor's measurement accuracy.
Download Product Introduction
▶ Product Features
  • Extra-large angle type
  • Large angle, maximum range
  • Applicable to more scenarios involving the measurement of curved surfaces
▶ Product Specifications
model H65R3A52S13 H65R1A52S13 H65R07A52S13
External dimensions 65mm*274mm 65mm*274mm 65mm*274mm
Reference distance 15.9mm 16.7mm 16.7mm
Measurement range ±1.5mm ±0.75mm ±0.375mm
Maximum measurable angle ±45° mirror reflection surface ±45° mirror reflection surface ±45° mirror reflection surface
Minimum measurable thickness 100μm 50μm 25μm
linear accuracy ±0.75μm ±0.38μm ±0.19mm
Resolution 6 nm 3nm 2 nm
Spot size 13μm 13μm 13μm
Ambient lighting 20000lux 20000lux 20000lux
Enclosure protection rating IP67 IP67 IP67
Temperature drift characteristics 0.005% of F.S. /℃ 0.005% of F.S. /℃ 0.005% of F.S. /℃
Operating temperature -20~85℃ -20~85℃ -20~85℃
Storage temperature 4~51℃ 4~51℃ 4~51℃
weight 590g 590g 590g